spin_coater
Table of Contents
Description
The spin coater in the cleanroom can be used for spin coating resists only.
Manual
- Cover the spin bowl completely with aluminium foil
- Switch on vacuum (black button)
- Push 'change pre' and select a recipe
- Clean bottom of sample, place it (centered) on the chuck
- Mount a tip on the pipet
- Open the resist bottle, fill the pipet at the surface, avoid getting air in
- Push air bubbles out
- Cover the sample with resist, push the start button and immediately place the cover
- Dispose the pipet tip and right away close the resist bottle
- When done, open cover, remove sample and bake
- Clean resist spills with acetone
Warning: recipes 1 and 2 (4000 and 6000 rpm) are standardized, do not change them! Use recipe 3 instead.
To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.
_1_ | _2_ |
_3_ | _4_ |
_5_ | _6_ |
_7_ | _8_ |
_9_ | _10_ |
- _1_ : edit
- _2_ : end edit
- _5_ : _6_ move cursor
- _7_ : (-) or 8 (+) to adjust
- _10_ : Enter
Settings
Recipe | Step | RPM | Ramp | Time |
---|---|---|---|---|
1 | 1 | 400 | 2 | 5 |
1 | 2 | 4000 | 2 | 1 |
1 | 3 | 6000 | 6 | 50 |
2 | 1 | 400 | 2 | 5 |
2 | 2 | 4000 | 4 | 1 |
2 | 3 | 4000 | 5 | 50 |
Miscellaneous
- The digital log sheet: spincoater_logbook.pdf
spin_coater.txt · Last modified: 2017/02/08 13:49 by scholma