deposition_processes_and_rates
A note about deposition rates
The calibrations can be found on the page of each deposition system. It is crucial to include all relevant informantion about the process. A calibration should always include:
- Date of sample fabrication
- Sample ID to find sample in system logbook
- Process parameters (pressure, current, voltage, deposition time, xtal thickness etc.)
- Measurement method (X-ray, RBS, AFM etc.)
- Measurement result
- Rate (nm/s or nm/A)
To the calibrations
deposition_processes_and_rates.txt · Last modified: 2018/05/04 12:07 by scholma