k-cell_evaporator
Table of Contents
Description
The K-cell evaporator is equipped with a Riber cell with a PBN crucible. The maximum temperature is 1350 C. The system is pumped with a turbo pump and can achieve a pressure in the 1e-8 mbar range after bake out (5e-7 without baking and 1 day of pumping). The system has a programmable Eurotherm temperature regulator and a manually operated shutter.
Manual
Venting the chamber
- Switch off the ion gauge
- Switch off the turbo pump and rotary pump
- Vent slowly with the green valve on the turbo
Mounting the substrate
- Release the KF clamp and remove the sample holder
- Mount the sample using the spring
- Mount the sample holder and tighten the KF clamp
Pump down
- Switch on the rotary pump
- Wait 5 min, you can hear from the sound of the rotary pump when the final pressure is reached ( there is no pirani to measure intermediate pressure)
- Switch on the turbo pump
- When the turbo pump is at full speed (all the green LED's are on) the ion gauge can be switched on by pushing emission
- Pump until the desired pressure is reached (but always <1e-6 mbar)
Evaporating a film
- Program the Eurotherm with the Eurotherm control program (let the K-cell degas above the deposition temperature)
- Open the shutter and time the deposition
- Close the shutter
End
- Let the Eurotherm control program cool down the K-cell
- Let the K-cell cool down completely to RT before removing the sample
Deposition rates
Material | Date | User | Process parameters | Measured with | Result | Rate |
---|---|---|---|---|---|---|
SiO2 | 20100331 | Boltje | 1090 oC | X-ray | 44 nm | 2.2 nm/min |
k-cell_evaporator.txt · Last modified: 2010/04/01 15:30 by boltje