plasmalab_90_logbook
TODO
- Chiller temp can be measured (D connector has 0-10V in and out, conversion to C has a weird 10C offset) build thermometer for this
- Install new baratron (expected 20060915)
- Connect pump exhaust, gaspod and gas cabinet to building exhaust (vastgoed)
- Detailed vacuum leak tests
- MFC calibration for gases used
- Change 380V wall socket plug (25A, 4 mm2 wires)
- Build PL7 interlock box
- Get 2 25cm diameter (very pure) quartz wafers (Chris)
- Repair or replace vacustat
20060911
- MFC's swapped, O2 and Ar are calibrated for those gases, vacuum leaktest OK (0.0 mtorr/min)
- Green gasline to 607 cut & sealed, now dedicated for O2 of both etchers
- Burned 2 CD's with mirror of Oxford PC installation
- BAM made the planning for the building exhaust line
20060904
- Chamber pumped to 4e-6 mbar, OK
- Overpressure tests of SF6, CF4, O2 and Ar lines performed (6 bar), no failures, no leaks
- Vacuum tests of all gaslines, all 0.0 mtorr/min (chamber) leak rate but mass flow controllers still have to be swapped
- Backups of computer made
20060901
- System installed
- Reactor removed from chamber, fully disassembled and cleaned
- Chamber turbo cleaning / revision
- VAT valve disassembly / cleaning
- MKS control valve disassembly cleaning
- Rough vacuum hoses and connectors disassembled/cleaned
- Leybold valves cleaned
- Pressure gauges cleaned, new baratron ordered
- Gas line overpressure tests (6 bar)
- Gas line overpressure leak tests (no measurable loss overnight)
- System reassembled
- Test run
BCl3 residue easily soluble in water
plasmalab_90_logbook.txt · Last modified: 2006/09/11 16:30 by hessel