med010
Table of Contents
Description
- very easy & fast to use, for, e.g., SEM sample metallization
- background pressure: <1E-6mbar, 650V, <150mA, 54mm targets
- no substrate cooling
Manual
Start up & Loading sample
- Open N2 line at the wall 1/2 turn (check pressure reducer)
- Open Ar bottle and the in-line valve in the yellow cabinet
- Check if the required target material is in
- If system is vented, insert your sample and close the top
- Switch on system mains (green switch)
- Switch on chiller (below the table)
Sputtering
- Purge the argon line by opening the needle valve and repeatedly opening and closing the argon valve at the bottle
- Carefully close the needle valve to pump down
- Switch turbo on at 1e-1 mbar by pressing “pumping unit” and “stand by” on the turbo controller
- Adjust pressure using needle valve to 5E-2mbar
- Set current dial knob to 0 and switch to “HTS”
- Select sputtering time and press start
- Adjust current dial for desired current (lower-righ indicator!)
- Wait
- Switch turbo pump off
- If turbo stands still, switch off machine (green button), automatic N2 purging starts
- Close Ar, N2 supply ; switch off chiller
change target
- open sputter head, fix head,
- remove the two rings (with gloves, no force!)
- replace target (manual: 54mm diameter)
- note target material on machine!
recent rates & other info
Material | Date | purpose | Process parameters | Measurement | Result | Rate |
---|---|---|---|---|---|---|
Ag (?) | 20110623 | SEM of SU-8 | 5E-2 mbar, 15 mA, 15s | SEM pic | nice |
bugs
yellow HV light does not go on
med010.txt · Last modified: 2012/09/20 14:43 by wolfgang