barrel_etcher
Table of Contents
Description
The barrel etcher is an O2 resist etcher/stripper for post-development cleaning of substrates or cleaning of SEM specimen. It is pumped by a 2-stage rotary pump with Fomblin oil.
Manual
- Open the O2 cylinder
- Turn the valve to
vent
- When the door pops open, close the vent valve
- Remove the glass boat, touch it only with gloves
- Put your substrate in the glass boat
- Slide the glass boat back into the apparatus, in the middle of the electrodes or 'downstream'
- Close the door and switch on the pump
- Wait until the pressure drops below 1e-2 mbar
- Turn the valve to
etch
- Set the gas flow so that the chamber pressure is 1e-1 mbar
- Switch on the mains of the RF power supply
- Switch on RF power (100 W) and time the process (verify that reflected power is zero)
- Switch off RF power
- Switch off RF power supply
- Switch off pump
- Vent and remove the sample, turn the valve to
off
- Leave the system at vacuum with the boat inside and the pump off
Etching rates
Material | Date | Rate |
---|---|---|
PMMA | 20050202 | 10 nm/min |
Be careful when etching resists on catalyst surfaces like Pd or Pt!
barrel_etcher.txt · Last modified: 2005/04/17 17:05 by 127.0.0.1