The calibrations can be found on the page of each deposition system.
It is crucial to include all relevant informantion about the process.
A calibration should always include:
Date of sample fabrication
Sample ID to find sample in system logbook
Process parameters (pressure, current, voltage, deposition time, xtal thickness etc.)
Measurement method (X-ray, RBS, AFM etc.)
Measurement result
Rate (nm/s or nm/A)