Materials
Material
Etchant
Temperature
Rate
Al
Alkalies, i.e. AZ312MIF:H2O 1:1
RT
? nm/min
MoGe
75% H3PO4 + 23% H2O + 2% HNO3
RT
>~50 nm/min
YBCO
5% h3PO4 + 95% H2O
RT
? nm/min
GdNi
75% H3PO4 + 23% H2O + 2% HNO3
RT
? nm/min