The spin coater in the cleanroom can be used for spin coating resists only.
Warning: recipes 1 and 2 (4000 and 6000 rpm) are standardized, do not change them! Use recipe 3 instead.
To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.
_1_ | _2_ |
_3_ | _4_ |
_5_ | _6_ |
_7_ | _8_ |
_9_ | _10_ |
Recipe | Step | RPM | Ramp | Time |
---|---|---|---|---|
1 | 1 | 400 | 2 | 5 |
1 | 2 | 4000 | 2 | 1 |
1 | 3 | 6000 | 6 | 50 |
2 | 1 | 400 | 2 | 5 |
2 | 2 | 4000 | 4 | 1 |
2 | 3 | 4000 | 5 | 50 |