Target: La0.67Ca0.33MnO3compound target
Substrate: STO
Pressure: 3 mbar O2
Flow: 40 ml/min
Current: 350 mA
Voltage: 393 V
Time: 30 min
Temp: 840 C
Remarks: -
XRR:
Results 40.7 nm
RBS:
Run:
File:
Result: