Target: La0.67Sr0.33MnO3compound target
Substrate: STO d551
Pressure: 3 mbar O2
Flow: 40 ml/min
Current: 350 mA
Voltage:332 V
Time: 60 min
Temp: 840 C
Remarks: -
XRR:
Results: 39 nm
RBS:
Run:
File:
Result: