Target: La0.67Ca0.33MnO3compound target
Substrate: STO miscut 1.0 deg
Pressure: 3 mbar O2
Flow: 40 ml/min
Current: 350 mA
Voltage:375 V
Time: 31 min 40 sec
Temp: 840 C
Remarks: -
XRR:
Results: 32.5 nm
RBS:
Run:
File:
Result: