• very easy & fast to use, for, e.g., SEM sample metallization
• background pressure: <1E-6mbar, 650V, <150mA, 54mm targets
• no substrate cooling

• Open N2 line at the wall 1/2 turn (check pressure reducer)
• Open Ar bottle and the in-line valve in the yellow cabinet
• Check if the required target material is in
• If system is vented, insert your sample and close the top
• Switch on system mains (green switch)
• Switch on chiller (below the table)

• Purge the argon line by opening the needle valve and repeatedly opening and closing the argon valve at the bottle
• Carefully close the needle valve to pump down
• Switch turbo on at 1e-1 mbar by pressing “pumping unit” and “stand by” on the turbo controller
• Adjust pressure using needle valve to 5E-2mbar
• Set current dial knob to 0 and switch to “HTS”
• Select sputtering time and press start
• Adjust current dial for desired current (lower-righ indicator!)
• Wait
• Switch turbo pump off
• If turbo stands still, switch off machine (green button), automatic N2 purging starts
• Close Ar, N2 supply ; switch off chiller

• open sputter head, fix head,
• remove the two rings (with gloves, no force!)
• replace target (manual: 54mm diameter)
• note target material on machine!

Don't do this because of high voltage in the machine!