The K-cell evaporator is equipped with a Riber cell with a PBN crucible. The maximum temperature is 1350 C. The system is pumped with a turbo pump and can achieve a pressure in the 1e-8 mbar range after bake out (5e-7 without baking and 1 day of pumping). The system has a programmable Eurotherm temperature regulator and a manually operated shutter.
Material | Date | User | Process parameters | Measured with | Result | Rate |
---|---|---|---|---|---|---|
SiO2 | 20100331 | Boltje | 1090 oC | X-ray | 44 nm | 2.2 nm/min |