Open the O2 cylinder
Turn the valve to vent
When the door pops open, close the vent valve
Remove the glass boat, touch it only with gloves
Put your substrate in the glass boat
Slide the glass boat back into the apparatus, in the middle of the electrodes or 'downstream'
Close the door and switch on the pump
Wait until the pressure drops below 1e-2 mbar
Turn the valve to etch
Set the gas flow so that the chamber pressure is 1e-1 mbar
Switch on the mains of the RF power supply
Switch on RF power (100 W) and time the process (verify that reflected power is zero)
Switch off RF power
Switch off RF power supply
Switch off pump
Vent and remove the sample, turn the valve to off
Leave the system at vacuum with the boat inside and the pump off