====== OLDER RATES ====== ^ Material ^ Date ^ Sample ID ^ Process parameters ^ Measured with ^ Result ^ Rate ^ | Al | 20040513 | Cristianne | 6e-3mbar, 220mA | RBS | - | 6.34A/nm | | Al | 20050324 | Sample3 | 6e-3mbar, 200mA, 5mins | X-ray | 116nm | 23.2nm/min | | Al | 20050628 | Machiel | 2.5e-3mbar, 200mA, 415V, 269deg, 6min | X-ray | 128nm (640A Xthal)| 3.56 A/s (1.78 A/s)| | Al | 20060329 | Chris | 4e-3mbar, 200mA, 357V, 45deg AWAY from target, 15min | X-ray | 44.5nm (1180A Xthal)| 2.97 nm/min (78.7 nm/min)| | Al | 20060913 | 13_9_6_5 | 4.0e-3 mbar, 200 mA, 5 min, tilted | X-ray | 110 nm | 46.8 nm | 22 nm/min | | Al | 20060918 | 18_9_6_1 | 4.0e-3 mbar, 200 mA, 5 min, tilted | α-stepper | 112-115 nm | 45.9 nm | 22.8 nm/min | | Co | 20111215 | CoUHVcal | 4.0e-3 mbar, 200 mA, 4 min | X-ray | 33.9 nm | 8.48 nm/min | | Co | 20120208 | CoUHV100mA | 4.0e-3 mbar, 100 mA, 5 min | X-ray | 21.0 nm | 4.20 nm/min | | Co | 20120209 | CoUHV50mA | 4.0e-3 mbar, 50 mA, 5 min | X-ray | 10.3 nm | 2.06 nm/min | | Co | 20120716 | UHV-Co-300s | 4.0e-3 mbar, xxx mA, 300 s | X-ray | 44.1 nm | 8.8 nm/min | | Co | 20120716 | UHV-Co-300s | 4.0e-3 mbar, xxx mA, 300 s | X-ray | 44.1 nm | 8.8 nm/min | | Co | 20130301 | Co-25mA | 4.0e-3 mbar, 25 mA, 1800 s | X-ray | 23.5 nm | 0.783 nm/min | | Co | 20130130 | Co-100mA | 4.0e-3 mbar, 100 mA, 485 s | X-ray | 29.2 nm | 3.61 nm/min | | Co | 20130130 | Co-200mA | 4.0e-3 mbar, 200 mA, 300 s | X-ray | 41.5 nm | 8.31 nm/min | | Co | 20130513 | Co-100mA | 4.0e-3 mbar, 100 mA, 600 s | X-ray | 34.79 nm | 3.479 nm/min | | Co | 20130625 | Co_10m | 4.0e-3 mbar, 100 mA, 600 s | X-ray | 35.3 nm | 3.53 nm/min | | Co | 20140321 | Co_50nm | 4.0e-3 mbar, 100 mA, 850 s, 45 deg | X-ray | 50.77 nm | 3.58 nm/min | | Cu | 20120513 | Cu | 4.0e-3 mbar, 65 mA, 180 s | X-ray | 34.13 nm | 11.37 nm/min | | Cu | 20111219 | CuUHVcal | 4.0e-3 mbar, 165 mA, 1.5 min | X-ray | 27.0 nm | 18.0 nm/min | | Cu | 20120716 | UHV-Cu-120s | 4.0e-3 mbar, xxx mA, 120 s | X-ray | 70.1 nm | 35.1 nm/min | | Cu | 20120716 | UHV-Cu-120s | 4.0e-3 mbar, xxx mA, 120 s | X-ray | 70.1 nm | 35.1 nm/min | | Cu | 20130130 | Cu | 4.0e-3 mbar, 65 mA, 180 s | X-ray | 33.9 nm | 11.30 nm/min | | Cu | 20120625 | Cu_3m | 4.0e-3 mbar, 65 mA, 180 s | X-ray | 32.2 nm | 10.73 nm/min | | CuNi | 20070924 | Cal_07_CuNi | 4.0e-3 mbar, 70 mA, 20 min | X-ray | 47.7 nm | 42.5 nm | 2.4 nm/min | | Cu_50Ni_50 | 20110712 | CuNi_cal | 4.0e-3 mbar, 70 mA, 20 min | X-ray | 40.2 nm | - | 2.0 nm/min | | CuNi | 20051130 | CN1 | 4e-3mbar, 70mA, 760V, 270sec | X-ray | 10.9nm | 0.40 A/s | | CuNi (back of old one) | 20061130 | 30_11_6_2 and 3| 4e-3mbar, 70mA, 2 mins and 5mins | Xray| 5.2nm and 12.4nm (45 and 112A Xtal) | Average 2.54 nm/min| | FeMn | 20060913 | 13_9_6_6 | 4.0e-3 mbar, 200 mA, 10 min | X-ray | 75 nm | 49.3 nm | 7.5 nm/min | | FeMn | 20060918 | 18_9_6_2 | 4.0e-3 mbar, 200 mA, 11 min | α-stepper | 75-80 nm | 53.2 nm | 7.1 nm/min | | FeMn50/50 | 20080404 | FeMn | 4.0e-3 mbar, 200 mA, 3.5 min | X-ray | 75.6 nm | 90.7 nm | 21.6 nm/min | | Fe_50Mn_50 | 20110712 | FeMn_cal | 4.0e-3 mbar, 200 mA, 5.0 min | X-ray | nm | - | nm/min | | Ho | 20130130 | Ho | 4.0e-3 mbar, 40 mA, 600 s | X-ray | 48.5 nm | 4.85 nm/min | | Nb | 20130130 | Nb | 4.0e-3 mbar, 200 mA, 480 s | X-ray | 24.8 nm | 3.1 nm/min | | Nb | 20030404 | Sasha | 6e-3mbar, 220mA | X-ray | - | 6.19A/nm | | Nb | 20050125 | Nb2 | 4e-3mbar, 220mA, 340V, 3min | X-ray | 22.5nm | 1.1A/s | | Nb | 20050922 | 220905 | 4e-3mbar, 220mA, 360V, 10min | X-ray | 68nm | 1.13A/s | | Nb | 20051507 | Machiel | 4.0e-3mbar, 220mA, 305V, 224deg, 15min | X-ray | 73nm (554A Xthal)| 0.81 A/s (0.62 A/s)| | Nb | 20051111 | Carla | 4.0e-3mbar, 220mA, 224deg, 3min | X-ray | 21.26 | 1.18 A/s | | Nb | 20060913 | 13_9_6_3 | 4.0e-3 mbar, 220 mA, 10 min | X-ray | 71.8 nm | 48.6 nm | 7.2 nm/min | | Nb | 20060918 | 18_9_6_6 | 4.0e-3 mbar, 220 mA, 10 min | α-stepper | 74 nm | 46.2 nm | 7.4 nm/min | | Nb | 20070302 | NbCal | 4.0e-3 mbar, 220 mA, 4.2 min | X-ray | 26.0 nm | 16.7 nm | 6.2 nm/min | | Nb | 20070924 | Cal_07_Nb | 4.0e-3 mbar, 220 mA, 8 min | X-ray | 55.6 nm | 33.8 nm | 6.7 nm/min | | Nb | 20090709 | Nb_Simon | 4.0e-3 mbar, 220 mA, 4 min | X-ray | 27.8 nm | 18.8 nm | 6.7 nm/min | | Nb | 20121113 | UHV-Nb-600s | 4.0e-3 mbar, 200 mA, 600 s | X-ray | 31.8 nm | 3.2 nm/min | | {{:data:20110713_nb.pdf|Nb}}| 20110713 | NG | 4.0e-3 mbar, 220 mA, 8 min | X-ray | 46.0 nm | xx.x nm | 5.75 nm/min | | Nb | 20120716 | UHV-Nb-340s | 4.0e-3 mbar, xxx mA, 340 s | X-ray | 23.6 nm | 4.2 nm/min | | Nb | 20121113 | UHV-Nb-600s | 4.0e-3 mbar, 200 mA, 600 s | X-ray | 31.8 nm | 3.2 nm/min | | Nb | 20120513 | Nb | 4.0e-3 mbar, 200 mA, 600 s | X-ray | 30.67 nm | 3.067 nm/min | | Nb | 20120625 | Nb_10m20s | 4.0e-3 mbar, 200 mA, 620 s | X-ray | 28.1 nm | 2.72 nm/min | | Ni | 20120625 | Ni_5m | 4.0e-3 mbar, 150 mA, 300 s | X-ray | 26.8 nm | 5.36 nm/min | | Ni | 20140218 | Ni 11min | 4.0e-3 mbar, 100 mA, 11 min | X-ray | 37.6 nm | 3.418 nm/min | | PdNi | 20040915 | PN1 | 4e-3mbar, 200mA, 532V, 5min | X-ray | 69.4nm | 13.88 nm/min | | PdNi | 20050125 | P8 | 4e-3mbar, 200mA, 518V, 90sec | X-ray | 20.0nm | 2.14 A/s | | PdNi | 20070302 | PdNiCal | 4.0e-3 mbar, 200 mA, 2.5 min | X-ray | 28.8 nm | 35.2 nm | 11.5 nm/min | | PdNi | 20100721 | PdNionSi | 4.0e-3 mbar, 100 mA, 10 min | X-ray | 50.8 nm | 60.0 nm | 5.1 nm/min | | PdNi | 20111215 | PdNiUHVcal | 4.0e-3 mbar, 160 mA, 4 min | X-ray | 63.9 nm | 16.0 nm/min | | PdNi | 20120716 | UHV-PdNi-150s | 4.0e-3 mbar, xxx mA, 150 s | X-ray | 43.8 nm | 17.5 nm/min | | PdNi | 20120716 | UHV-PdNi-150s | 4.0e-3 mbar, xxx mA, 150 s | X-ray | 43.8 nm | 17.5 nm/min | | Pt | 20111215 | PtUHVcal | 4.0e-3 mbar, 120 mA, 4 min | X-ray | 27.3 nm | 6.83 nm/min | | Pt | 20120513 | Pt | 4.0e-3 mbar, 120 mA, 300 s | X-ray | 46.22 nm | 9.244 nm/min | | Py | 20040226 | Christianne| 4e-3mbar, 165mA | X-ray | - | 1 nm/5.9sec | | Py | 20040809 | Christianne| 4e-3mbar, 165mA | X-ray | - | 2.54A/nm | | Py | 20050317 | Youri | 6e-3mbar, 200mA, 4min48s | X-ray | 57.8nm | 2.72A/nm | | Py | 20050628 | Machiel | 2.5e-3mbar, 165mA, 485V, 179deg, 10min | X-ray | 122nm (337A Xthal)| 2.03 A/s (0.56 A/s)| | Py | 20060913 | 13_9_6_2 | 4.0e-3 mbar, 200 mA, 10 min, tilted | X-ray | 163 nm | 42.2 nm | 16.3 nm/min | | Py | 20060918 | 18_9_6_5 | 4.0e-3 mbar, 100 mA, 10 min, tilted | α-stepper | 80-84 nm | 19.0 nm | 8.2 nm/min | | Py | 20060918 | 18_9_6_3 | 2.5e-3 mbar, 165 mA, 10 min, tilted | α-stepper | 142-147 nm | 36.6 nm | 14.5 nm/min | | Py | 20070924 | Cal_07_Py | 2.5e-3 mbar, 165 mA, 3.3 min | X-ray | 45.5 nm | 10.7 nm | 13.7 nm/min | | Py | 20090401 | Py2.5e-3mbar| 2.5e-3 mbar, 165 mA, 3 min | X-ray | 30.9 nm | - | 10.3 nm/min | | Py | 20090401 | Py4.0e-3mbar| 4.0e-3 mbar, 165 mA, 3 min | X-ray | 27.9 nm | - | 9.3 nm/min |