====== Materials ====== ^Material ^Etchant ^ Temperature ^ Rate ^ | Al | Alkalies, i.e. AZ312MIF:H2O 1:1 | RT | ? nm/min | | MoGe | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | >~50 nm/min | | YBCO | 5% h3PO4 + 95% H2O | RT | ? nm/min | | GdNi | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | ? nm/min |