Target: La0.67Ca0.33MnO3compound target\\ Substrate: STO \\ Pressure: 3 mbar O2\\ Flow: 40 ml/min \\ Current: 350 mA \\ Voltage: 393 V \\ Time: 30 min \\ Temp: 840 C \\ Remarks: -\\ XRR: \\ Results 40.7 nm\\ RBS: \\ Run: \\ File: \\ Result: \\