Target: La0.67Ca0.33MnO3compound target\\ Substrate: STO miscut 1.0 deg\\ Pressure: 3 mbar O2\\ Flow: 40 ml/min \\ Current: 350 mA \\ Voltage:375 V \\ Time: 31 min 40 sec\\ Temp: 840 C \\ Remarks: -\\ XRR: \\ Results: 32.5 nm\\ RBS: \\ Run: \\ File: \\ Result: \\