Target: La0.67Ca0.33MnO3compound target\\ Substrate: NGO \\ Pressure: 3 mbar O2\\ Flow: 40 ml/min \\ Current: 350 mA \\ Voltage:380 V \\ Time: 60 min\\ Temp: 840 C \\ Remarks: -\\ XRR: \\ Results: -\\ RBS: \\ Run: \\ File: \\ Result: \\