Target: La0.67Ca0.33MnO3compound target\\
Substrate: STO d290 \\
Pressure: 3 mbar O2\\
Flow: 40 ml/min \\
Current: 350 mA \\
Voltage:379 V \\
Time: 60 min\\
Temp: 840 C \\
Remarks: -\\
XRR: \\
Results: 25 nm\\
RBS: \\
Run: \\
File: \\
Result: \\