====TODO====
  - Chiller temp can be measured (D connector has 0-10V in and out, conversion to C has a weird 10C offset) build thermometer for this
  - Install new baratron (expected 20060915)
  - Connect pump exhaust, gaspod and gas cabinet to building exhaust (vastgoed)
  - Detailed vacuum leak tests
  - MFC calibration for gases used
  - Change 380V wall socket plug (25A, 4 mm2 wires)
  - Build PL7 interlock box
  - Get 2 25cm diameter (very pure) quartz wafers (Chris)
  - Repair or replace vacustat

====20060911====
  - MFC's swapped, O2 and Ar are calibrated for those gases, vacuum leaktest OK (0.0 mtorr/min)
  - Green gasline to 607 cut & sealed, now dedicated for O2 of both etchers
  - Burned 2 CD's with mirror of Oxford PC installation
  - BAM made the planning for the building exhaust line

====20060904====
  * Chamber pumped to 4e-6 mbar, OK
  * Overpressure tests of SF6, CF4, O2 and Ar lines performed (6 bar), no failures, no leaks
  * Vacuum tests of all gaslines, all 0.0 mtorr/min (chamber) leak rate but mass flow controllers still have to be swapped
  * Backups of computer made

====20060901====
  * System installed
  * Reactor removed from chamber, fully disassembled and cleaned
  * Chamber turbo cleaning / revision
  * VAT valve disassembly / cleaning
  * MKS control valve disassembly cleaning
  * Rough vacuum hoses and connectors disassembled/cleaned 
  * Leybold valves cleaned
  * Pressure gauges cleaned, new baratron ordered
  * Gas line overpressure tests (6 bar)
  * Gas line overpressure leak tests (no measurable loss overnight)
  * System reassembled
  * Test run
BCl3 residue easily soluble in water