===== Plasma Cleaner manual ====
{{ :plasma_cleaner_pdc-32g-2_usermanual_2022.pdf |Plasma Cleaner manual}}

==== DO's and DONT's ====

Only use bare substrate in the plasma cleaner, all exceptions should be discussed.
  * Si
  * SiO2
  * glass/quartz


==== MANUAL ====

  * Load samples on the sample tray
  * Start the vacuum pump while holding the door, make sure black valve is pointing down
  * Pump down to <100mTorr
  * Set black valve to the needle valve
    * if needle valve is open the pressure should go to previous setpoint (check the logbook)
    * or change the setpoint
  * Wait for pressure to stabilize
  * set RF (low, mid or high)
  * When plasma ignites start your timer
  * Turn off RF when timer finishes
  * Close black valve (valve pointing down)
  * Pump down to <100mTorr to make sure etch products are removed from the chamber
  * Stop the vacuum pump
  * Turn black valve to the right to vent
    * vent slowly to avoid samples flying around in the chamber
  * Close black valve (valve pointing down) 
  * close the door
  * write in the logbook: name, date, sample, process conditions, any remarks
==== Recipes ====
Typical cleaning process:\\
500-900mTorr\\
1-3 minutes\\
High RF


=== Maintenance ===

Tip seal change of vacuum pump\\
Cleaning sample tray and chamber\\