====== Welcome to the NanoLab! ====== {{http://nano.physics.leidenuniv.nl/images/uhv.jpg?width=100}} {{http://nano.physics.leidenuniv.nl/images/600x.png?width=100}} {{http://nano.physics.leidenuniv.nl/images/pmgi_pmma.jpg?width=100}} {{http://nano.physics.leidenuniv.nl/images/mfm2.jpg?width=100}} {{http://nano.physics.leidenuniv.nl/images/ebidsample2.jpg?width=100}} ===== What is the NanoLab ===== The NanoLab is the MSM group's infrastructure for the fabrication of submicron structures of metals and oxides. The [[http://www.physics.leidenuniv.nl/sections/cm/msm/|MSM group]] is part of the [[http://www.physics.leidenuniv.nl/sections/cm/|Kamerlingh Onnes Laboratory]] of the [[http://www.physics.leidenuniv.nl|Leiden institute of physics]]. ===== NanoLab facilities ===== The NanoLab equipment for thin film deposition, lithography, etching, inspection and other processing equipment can be found on the [[facilities]] page. ===== The MSM wiki ===== The MSM [[wiki]] is a system of web pages that can be read, improved and extended by everyone who has access to them and functions as the group's common knowledge base. Access is limited to selected local users only. ==== Sample fabrication ==== * [[Equipment manuals]] * [[Deposition processes and rates]] * [[Resist and e-beam recipes]] * [[Optical lithography recipes]] * [[Ion etching recipes and rates]] * [[Wet etching recipes and rates]] ==== Safety ==== * [[Safety and lab regulations]] * [[Working with chemicals]] ==== Papers and talks ==== (this section is completely out of date) * [[MSM Papers]] * [[papers:papers|Recent papers]] * [[Group meeting talks]] * [[Student reports]] * [[Relevant literature]] * [[Books]] * [[Conference talks]] ==== Other ==== * [[Latex links and examples]] * [[Software and Computers]] * [[Cables and connectors]] ---- Contact [[Marcel Hesselberth]] if you have questions about this documentation system or want to add new pages. Edit a page only if you are sure you will //improve// it (read [[wiki|how]]).