====== Description ======
The K-cell evaporator is equipped with a Riber cell with a PBN crucible.
The maximum temperature is 1350 C. The system is pumped with a turbo pump and
can achieve a pressure in the 1e-8 mbar range after bake out (5e-7 without
baking and 1 day of pumping).
The system has a programmable Eurotherm temperature regulator and a manually
operated shutter.

====== Manual ======

==== Venting the chamber ==== 
  - Switch off the ion gauge
  - Switch off the turbo pump and rotary pump
  - Vent //slowly// with the green valve on the turbo

==== Mounting the substrate ==== 
  - Release the KF clamp and remove the sample holder
  - Mount the sample using the spring
  - Mount the sample holder and tighten the KF clamp

==== Pump down ====
  - Switch on the rotary pump
  - Wait 5 min, you can hear from the sound of the rotary pump when the final pressure is reached ( there is no pirani to measure intermediate pressure)
  - Switch on the turbo pump
  - When the turbo pump is at full speed (all the green LED's are on) the ion gauge can be switched on by pushing emission
  - Pump until the desired pressure is reached (but always <1e-6 mbar)

==== Evaporating a film ====
  - Program the Eurotherm with the Eurotherm control program (let the K-cell degas above the deposition temperature)
  - Open the shutter and time the deposition
  - Close the shutter

==== End ====
  - Let the Eurotherm control program cool down the K-cell
  - **Let the K-cell cool down completely to RT before removing the sample**


====== Deposition rates ======
^ Material ^  Date     ^ User ^ Process parameters           ^ Measured with  ^ Result ^ Rate          ^
|    SiO<sub>2</sub>    | 20100331  |    Boltje     | 1090 <sup>o</sup>C   | X-ray            | 44 nm  | 2.2 nm/min     |